TY  - RPRT
TI  - MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype
AU  - Xiaoyu Niu
AU  - Zihuan Liu
AU  - Ehsan Vatankhah
AU  - Yuqi Meng
AU  - Neal A. Hall
PY  - 2026
UR  - https://arxiv.org/abs/2608.02203
ID  - 2608.02203
ER  -