@misc{indiciae7c13612e1225, title = {Zero-change foundry compatible silicon photonics MEMS optical switch}, author = {Arkadev Roy and Daniel Klawson and Jianheng Luo and Yiyang Zhi and Sirui Tang and Ming Wu}, year = {2026}, url = {https://arxiv.org/abs/2608.03146}, note = {Source identifier: 2608.03146} }