TY - RPRT TI - Precision Specimen Positioning in Electron Microscopy through Hysteresis Compensation, Iterative Learning, and Vision-Based Sensing AU - J. S. van Hulst AU - A. M. C. de Peffer AU - D. Herceg AU - E. M. Franken AU - E. Verschueren AU - W. P. M. H. Heemels AU - D. J. Antunes PY - 2026 UR - https://arxiv.org/abs/2608.03669 ID - 2608.03669 ER -