@misc{indiciae68ba58e3238a,
  title = {Self-Focusing Control for Depth-Precise Wafer Slicing of 4H-SiC in Femtosecond Laser Processing},
  author = {Dong Hee Kang and Jaeseung Lim and Mishfaqur Rahman and Seongheum Han and Jae-Hak Lee and Seungman Kim and Jihoon Jeong},
  year = {2026},
  url = {https://arxiv.org/abs/2608.03814},
  note = {Source identifier: 2608.03814}
}