TY  - RPRT
TI  - Self-Focusing Control for Depth-Precise Wafer Slicing of 4H-SiC in Femtosecond Laser Processing
AU  - Dong Hee Kang
AU  - Jaeseung Lim
AU  - Mishfaqur Rahman
AU  - Seongheum Han
AU  - Jae-Hak Lee
AU  - Seungman Kim
AU  - Jihoon Jeong
PY  - 2026
UR  - https://arxiv.org/abs/2608.03814
ID  - 2608.03814
ER  -