@misc{indiciae1b10d7881cb5,
  title = {Reduction of intrinsic losses in nanomechanical silicon nitride resonators through thermal treatment in ultrahigh vacuum},
  author = {Nicola Cavalleri and Ariane Giesriegl and Robert G. West and Kostas Kanellopulos and Saeed Rasouli and Daniele Nazzari and Pedram Sadeghi and Sebastian Alberti and Antonius Armanious and Silvan Schmid},
  year = {2026},
  url = {https://arxiv.org/abs/2608.05252},
  note = {Source identifier: 2608.05252}
}