TY  - RPRT
TI  - Reduction of intrinsic losses in nanomechanical silicon nitride resonators through thermal treatment in ultrahigh vacuum
AU  - Nicola Cavalleri
AU  - Ariane Giesriegl
AU  - Robert G. West
AU  - Kostas Kanellopulos
AU  - Saeed Rasouli
AU  - Daniele Nazzari
AU  - Pedram Sadeghi
AU  - Sebastian Alberti
AU  - Antonius Armanious
AU  - Silvan Schmid
PY  - 2026
UR  - https://arxiv.org/abs/2608.05252
ID  - 2608.05252
ER  -