@misc{indiciae982640176198,
  title = {Inverse mask design for interference lithography using automatic differentiable wave propagation},
  author = {Chuntian Cao and Jangwoon Sung and Jack Griffiths and Yuan Gao and Xi Yu and Paul Baity and Nikhil Tiwale and Zhitian Shi and Juhong Ahn and Shinjae Yoo and Yong S. Chu and Chang-Yong Nam},
  year = {2026},
  url = {https://arxiv.org/abs/2608.05488},
  note = {Source identifier: 2608.05488}
}