@misc{indiciae5b1de5a3f02f,
  title = {Beam experiments for reactive ion etching of silicon (Si)-based materials by silicon halide ions},
  author = {Kazuhiro Karahashi and Tomoko Ito and Satoshi Hamaguchi},
  year = {2026},
  url = {https://arxiv.org/abs/2608.08031},
  note = {Source identifier: 2608.08031}
}