TY  - RPRT
TI  - Beam experiments for reactive ion etching of silicon (Si)-based materials by silicon halide ions
AU  - Kazuhiro Karahashi
AU  - Tomoko Ito
AU  - Satoshi Hamaguchi
PY  - 2026
UR  - https://arxiv.org/abs/2608.08031
ID  - 2608.08031
ER  -