@misc{indiciae86f09a0599db,
  title = {High Thermal Conductivity of Back-End-of-Line Compatible Diamond Films},
  author = {Jinwen Liu and Chufei Cheng and Feifei Tan and Jinquan Zhang and Di Lu and Bing Dai and Jiaqi Zhu and Runsheng Wang and Zhe Cheng},
  year = {2026},
  url = {https://arxiv.org/abs/2608.08534},
  note = {Source identifier: 2608.08534}
}