@misc{indiciae7b30cf926577,
  title = {An Automated Magnetron Sputtering Chamber for Ferroelectric Thin Film Deposition},
  author = {Stanislav A. Udovenko and Ian Mercer and Sarah Olandt and Ric Wilburn and Kevin Dressler and Susan Trolier-McKinstry and Jon-Paul Maria and Darren C. Pagan},
  year = {2026},
  url = {https://arxiv.org/abs/2608.08647},
  note = {Source identifier: 2608.08647}
}