@misc{indiciaea71833b635a6,
  title = {200 mm Wafer-Scale Monolithic 3D Integration of Atomic Layer-Deposited Oxide Semiconductors},
  author = {Chang Niu and Linjia Long and Luqi Zheng and Shuting Du and Jian-Yu Lin and Kisoo Nam and Zehao Lin and Chang Liu and Juanjuan Lu and Haiyan Wang and Haitong Li and Peide D. Ye},
  year = {2026},
  url = {https://arxiv.org/abs/2608.09508},
  note = {Source identifier: 2608.09508}
}