@misc{indiciae709064ede49e, title = {Practical Evaluation of FFT-Based Thickness Extraction for Thick-Film Reflectometry}, author = {Zimu Zhou and Enrique A. Lopez-Guerra and Michael Kwan and Chester Chien}, year = {2026}, url = {https://arxiv.org/abs/2608.10146}, note = {Source identifier: 2608.10146} }