TY  - RPRT
TI  - Practical Evaluation of FFT-Based Thickness Extraction for Thick-Film Reflectometry
AU  - Zimu Zhou
AU  - Enrique A. Lopez-Guerra
AU  - Michael Kwan
AU  - Chester Chien
PY  - 2026
UR  - https://arxiv.org/abs/2608.10146
ID  - 2608.10146
ER  -