@misc{indiciae60cdfc8ddc05,
  title = {Information-Theoretic Causal Modelling of Semiconductor Process Dynamics},
  author = {Daniel Sørensen and Giorgio Melchiorre and Sudip Bandyopadhyay and Sandip Halder and Roel Wuyts and Bappaditya Dey},
  year = {2026},
  url = {https://arxiv.org/abs/2608.14678},
  note = {Source identifier: 2608.14678}
}