@misc{indiciaeb1fc468bbaf1,
  title = {An integrated micro-thermometer for mid-infrared photothermal spectroscopy of dense materials built in a CMOS 200 mm pilot line},
  author = {Sandy Mathew and Sonia Messaoudène and Adrien Poizat and Éléa Bourliaud and Marion Volpert and Jules Skubich and Stanislas Lhomme and Bertrand Bourlon and Kevin Jourde},
  year = {2026},
  url = {https://arxiv.org/abs/2608.21809},
  note = {Source identifier: 2608.21809}
}