@misc{indiciae34e92e9c3037, title = {Machine-learning-guided molecular dynamics simulations of point defect evolution in beta-Ga2O3 during ion implantation and annealing}, author = {Huawen Li and Mengzhi Yan and Zongwei Xu and Junlei Zhao and Jiale Wang}, year = {2026}, doi = {10.1016/j.actamat.2026.122596}, url = {https://arxiv.org/abs/2608.22282}, note = {Source identifier: 2608.22282} }