TY - RPRT TI - Machine-learning-guided molecular dynamics simulations of point defect evolution in beta-Ga2O3 during ion implantation and annealing AU - Huawen Li AU - Mengzhi Yan AU - Zongwei Xu AU - Junlei Zhao AU - Jiale Wang PY - 2026 DO - 10.1016/j.actamat.2026.122596 UR - https://arxiv.org/abs/2608.22282 ID - 2608.22282 ER -