@misc{indiciae2032c785db55,
  title = {AAA rational approximation for scatterometry of nanoscale gratings},
  author = {Livius Leibl and Viktoriia Sytenko and Rana Demircioglu and Leonid Beliaev and Felix Binkowski},
  year = {2026},
  url = {https://arxiv.org/abs/2608.28185},
  note = {Source identifier: 2608.28185}
}