TY  - RPRT
TI  - AAA rational approximation for scatterometry of nanoscale gratings
AU  - Livius Leibl
AU  - Viktoriia Sytenko
AU  - Rana Demircioglu
AU  - Leonid Beliaev
AU  - Felix Binkowski
PY  - 2026
UR  - https://arxiv.org/abs/2608.28185
ID  - 2608.28185
ER  -