@misc{indiciae3d6dcf736ec5,
  title = {All-dry processing of 3C-SiC nanomechanical string resonators for extreme aspect ratios and high intrinsic quality factor},
  author = {Felix David and Philipp Bredol and Yannick S. Klaß and Eva M. Weig},
  year = {2026},
  url = {https://arxiv.org/abs/2609.02530},
  note = {Source identifier: 2609.02530}
}