TY  - RPRT
TI  - All-dry processing of 3C-SiC nanomechanical string resonators for extreme aspect ratios and high intrinsic quality factor
AU  - Felix David
AU  - Philipp Bredol
AU  - Yannick S. Klaß
AU  - Eva M. Weig
PY  - 2026
UR  - https://arxiv.org/abs/2609.02530
ID  - 2609.02530
ER  -