TY - RPRT TI - Hierarchical automation of scanning probe microscopy through agentic orchestration and algorithmic control AU - Boris N. Slautin AU - Sheryl L. Sanchez AU - Aidan Swanger AU - Yu Liu AU - Gerd Duscher AU - Vladimir V. Shvartsman AU - Mahshid Ahmadi AU - Sergei V. Kalinin PY - 2026 UR - https://arxiv.org/abs/2609.04015 ID - 2609.04015 ER -