@misc{indiciaeab91d51844db,
  title = {Oxidation of Tantalum Nano-Film by Microwave Exposure},
  author = {Massimiliano Zamengo and Lina Grineviciute and Hsin-Hui Huang and Haoran Mu and Julianija Nikitina and Saulius Juodkazis and Junko Morikawa},
  year = {2026},
  url = {https://arxiv.org/abs/2609.06019},
  note = {Source identifier: 2609.06019}
}