@misc{indiciae1e8f1f8ddef2,
  title = {Physics-Constrained Inverse Estimation of Irradiation-Induced Strain in He-H Ion-Implanted 4H-SiC Using Nanoindentation and Finite Element Modeling},
  author = {M. Bensalem and N. Daghbouj and J. Duchon and B. S. Li and A. T. AlMotasem and S. Magalhaes and A. Yie and F. Munnik and Xin Ou and W. J. Weber and T. Polcar},
  year = {2026},
  url = {https://arxiv.org/abs/2609.07157},
  note = {Source identifier: 2609.07157}
}