@misc{indiciae1a6c8ed0ee49,
  title = {Groove-shaped defects in as-grown (001)-oriented \$β\$-Ga\$\_2\$O\$\_3\$ epilayers prepared by halide vapor phase epitaxy},
  author = {Yongzhao Yao and Daiki Katsube and Hirotaka Yamaguchi and Yukari Ishikawa},
  year = {2026},
  url = {https://arxiv.org/abs/2609.07209},
  note = {Source identifier: 2609.07209}
}