TY  - RPRT
TI  - Groove-shaped defects in as-grown (001)-oriented $β$-Ga$_2$O$_3$ epilayers prepared by halide vapor phase epitaxy
AU  - Yongzhao Yao
AU  - Daiki Katsube
AU  - Hirotaka Yamaguchi
AU  - Yukari Ishikawa
PY  - 2026
UR  - https://arxiv.org/abs/2609.07209
ID  - 2609.07209
ER  -