@misc{indiciae050e231c6ec8,
  title = {More is not always better: Dissociative photoionization limits the EUV absorbing photoacid generator pentafluorophenyl triflate in photolithography},
  author = {Fabian Holzmeier and Michiel J. van Setten and Ragnar Björnsson and Robert Richter and Filipe Ferreira da Silva and Oddur Ingólfsson},
  year = {2026},
  url = {https://arxiv.org/abs/2609.09958},
  note = {Source identifier: 2609.09958}
}