TY  - RPRT
TI  - More is not always better: Dissociative photoionization limits the EUV absorbing photoacid generator pentafluorophenyl triflate in photolithography
AU  - Fabian Holzmeier
AU  - Michiel J. van Setten
AU  - Ragnar Björnsson
AU  - Robert Richter
AU  - Filipe Ferreira da Silva
AU  - Oddur Ingólfsson
PY  - 2026
UR  - https://arxiv.org/abs/2609.09958
ID  - 2609.09958
ER  -