@misc{indiciae251482da8c7a, title = {High-Performance Scaled P-Type SnOx Transistor by Atomic Layer Deposition with CFET Integration}, author = {Ziheng Wang and Wen He and Chen Gu and Kai Jiang and Liankai Zheng and Jinxiu Zhao and Zhiyu Lin and Xiangjun Liu and Di Geng and Ling Li and Mengwei Si}, year = {2026}, url = {https://arxiv.org/abs/2609.11114}, note = {Source identifier: 2609.11114} }