@misc{indiciaec3938a71f5ff,
  title = {A Two-Mirror Faceted Projection System for EUV Lithography},
  author = {Vasiliy A. Es'kin and Egor V. Ivanov and Olga V. Martynova},
  year = {2026},
  url = {https://arxiv.org/abs/2609.11299},
  note = {Source identifier: 2609.11299}
}