TY  - RPRT
TI  - A Two-Mirror Faceted Projection System for EUV Lithography
AU  - Vasiliy A. Es'kin
AU  - Egor V. Ivanov
AU  - Olga V. Martynova
PY  - 2026
UR  - https://arxiv.org/abs/2609.11299
ID  - 2609.11299
ER  -