@misc{indiciaeddcce8c073f1,
  title = {Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science},
  author = {Sameer Sadruddin and Eleni Poupaki and Alex Watkins and Bora Karasulu and Adriaan J. M. Mackus and Erwin Kessels and Sören Auer and Jennifer D'Souza},
  year = {2026},
  url = {https://arxiv.org/abs/2609.12139},
  note = {Source identifier: 2609.12139}
}