@misc{indiciae371b5873674e,
  title = {Enhancing Conformality in Atomic Layer Deposition through Low Growth Per Cycle},
  author = {Christine Gonsalves and Jorge A. Velasco and Ahmed Othman and Ville Miikkulainen and Riikka L. Puurunen},
  year = {2026},
  url = {https://arxiv.org/abs/2609.12460},
  note = {Source identifier: 2609.12460}
}