@misc{indiciae4a49af689768,
  title = {Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes},
  author = {Oleksiy V. Penkov and Haoyu Fu and Yueying Zhan and Pengyuan Wu and Jiong Jin},
  year = {2026},
  url = {https://arxiv.org/abs/2609.12796},
  note = {Source identifier: 2609.12796}
}