TY  - RPRT
TI  - Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes
AU  - Oleksiy V. Penkov
AU  - Haoyu Fu
AU  - Yueying Zhan
AU  - Pengyuan Wu
AU  - Jiong Jin
PY  - 2026
UR  - https://arxiv.org/abs/2609.12796
ID  - 2609.12796
ER  -