@misc{indiciae03257f7f44ba, title = {PRISM-UDE: Physics-Regularized Iterative Symbolic Modeling of 3nm FinFETs via Universal Differential Equation}, author = {Pranavanath Balamurali and Prathamesh Dinesh Joshi and Raj Abhijit Dandekar and Rajat Dandekar and Sreedath Panat}, year = {2026}, url = {https://arxiv.org/abs/2609.13200}, note = {Source identifier: 2609.13200} }