@misc{indiciae155bb46368fe,
  title = {Demonstrate of High-Performance Top-Gate ALD Crystalline In2O3 Transistor Enabled by Lattice-Matched HfO2 and In2O3 Heterostructure},
  author = {Kai Jiang and Chen Wang and Ziheng Wang and Zhiyu Lin and Mengwei Si},
  year = {2026},
  url = {https://arxiv.org/abs/2609.15135},
  note = {Source identifier: 2609.15135}
}