TY  - RPRT
TI  - Demonstrate of High-Performance Top-Gate ALD Crystalline In2O3 Transistor Enabled by Lattice-Matched HfO2 and In2O3 Heterostructure
AU  - Kai Jiang
AU  - Chen Wang
AU  - Ziheng Wang
AU  - Zhiyu Lin
AU  - Mengwei Si
PY  - 2026
UR  - https://arxiv.org/abs/2609.15135
ID  - 2609.15135
ER  -