@misc{indiciaefef6490dc966,
  title = {An Open-Source Hardware and Software Toolkit to Enable Agentic RHEED-Guided Thin-Film Synthesis},
  author = {Asraful Haque and Christopher M. Rouleau and Rama K. Vasudevan and Sumner B. Harris},
  year = {2026},
  url = {https://arxiv.org/abs/2609.15922},
  note = {Source identifier: 2609.15922}
}