TY  - RPRT
TI  - An Open-Source Hardware and Software Toolkit to Enable Agentic RHEED-Guided Thin-Film Synthesis
AU  - Asraful Haque
AU  - Christopher M. Rouleau
AU  - Rama K. Vasudevan
AU  - Sumner B. Harris
PY  - 2026
UR  - https://arxiv.org/abs/2609.15922
ID  - 2609.15922
ER  -