@misc{indiciaeb3476852b0c9,
  title = {A transfer-rod-mounted rotatable sample holder enabling a compact modular vacuum system for ion-beam milling, oblique magnetron sputtering, and co-sputtering},
  author = {Tiago de Oliveira Schneider and Folke Kaiser and Andreas Semrad and Peter Kießlich and Markus Meinert},
  year = {2026},
  url = {https://arxiv.org/abs/2609.17220},
  note = {Source identifier: 2609.17220}
}