TY  - RPRT
TI  - A transfer-rod-mounted rotatable sample holder enabling a compact modular vacuum system for ion-beam milling, oblique magnetron sputtering, and co-sputtering
AU  - Tiago de Oliveira Schneider
AU  - Folke Kaiser
AU  - Andreas Semrad
AU  - Peter Kießlich
AU  - Markus Meinert
PY  - 2026
UR  - https://arxiv.org/abs/2609.17220
ID  - 2609.17220
ER  -