@misc{indiciae12581c3fa2a3,
  title = {Low Temperature Halide Assisted HVPE Growth of Single Crystal AlN Films},
  author = {K. Udwary and M. Smeaton and J. S. Mangum and R. Gannon and G. Dodson and B. Tellekamp and K. L. Schulte and J. H. Leach and J. Simon},
  year = {2026},
  url = {https://arxiv.org/abs/2609.18647},
  note = {Source identifier: 2609.18647}
}