@misc{indiciae3ab69f83b22a,
  title = {Adaptive Substrate Support Based on Thin-Film Piezoelectric Actuators},
  author = {Ertuğ Şimşek and Bas Jansen and Marcelo Ackermann and Muharrem Bayraktar},
  year = {2026},
  url = {https://arxiv.org/abs/2609.18653},
  note = {Source identifier: 2609.18653}
}