TY  - RPRT
TI  - Adaptive Substrate Support Based on Thin-Film Piezoelectric Actuators
AU  - Ertuğ Şimşek
AU  - Bas Jansen
AU  - Marcelo Ackermann
AU  - Muharrem Bayraktar
PY  - 2026
UR  - https://arxiv.org/abs/2609.18653
ID  - 2609.18653
ER  -