@misc{indiciae5c5552be516f,
  title = {Faulted loop nucleation and dopant activation in Al-implanted 4H-SiC},
  author = {Sabine Leroch and Robert Stella and Andreas Hössinger and Lado Filipovic},
  year = {2026},
  url = {https://arxiv.org/abs/2609.20986},
  note = {Source identifier: 2609.20986}
}