TY  - RPRT
TI  - Faulted loop nucleation and dopant activation in Al-implanted 4H-SiC
AU  - Sabine Leroch
AU  - Robert Stella
AU  - Andreas Hössinger
AU  - Lado Filipovic
PY  - 2026
UR  - https://arxiv.org/abs/2609.20986
ID  - 2609.20986
ER  -