@misc{indiciaea06a046ddcde,
  title = {Efficient creation of shallow NV\$\textasciicircum{}-\$ ensembles by high-angle ion implantation},
  author = {Kento Sasaki and Hideyuki Watanabe and Tokuyuki Teraji and Takashi Taniguchi and Kenji Watanabe and Kensuke Kobayashi},
  year = {2026},
  doi = {10.1103/d8vg-ntsg},
  url = {https://arxiv.org/abs/2609.22937},
  note = {Source identifier: 2609.22937}
}